Patent holdings for IPC class H01J 37/065

Total number of patents in this class: 125

10-year publication summary

12
9
10
15
9
8
11
11
9
4
2015 2016 2017 2018 2019 2020 2021 2022 2023 2024

Principal owners for this class

Owner
All patents
This class
ASML Netherlands B.V.
6816
17
NuFlare Technology, Inc.
770
8
Hitachi High-Tech Corporation
4424
8
Hitachi High-Technologies Corporation
2034
6
KLA-Tencor Corporation
2574
6
Advantest Corporation
1939
4
Mapper Lithography IP B.V.
136
4
Nikon Metrology, NV
69
3
38th Research Institute, China Electronics Technology Group Corporation
36
3
Denki Kagaku Kogyo Kabushiki Kaisha
680
3
Paton Turbine Technologies LLC
3
3
Applied Physics Technologies, Inc.
12
2
Arcam AB
204
2
Denka Company Limited
2189
2
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
149
2
Param Corporation
8
2
Titanium Metals Corporation
80
2
ULVAC, Inc.
1448
2
NuFlare Technology America, Inc.
21
2
TWi Limited
17
2
Other owners 42